Establishment of Production System with Manufacturing Volume of 15 Tons/Year with the Completion of the ArF Facilities
Toyo Gosei has completed its ArF polymer manufacturing facilities (A-1 facilities) in November 2002 and received more orders from its customers than foreseen. Given the further expansion of demand for semiconductors for digital appliances and cell phones in the future, Toyo Gosei completed its second series of ArF polymer manufacturing facilities (A-2 facilities) with five times the capacity of the A-1 facilities. With the completion of these facilities, a mass production system has been established for annual production of 15 tons of ArF polymer.
These A-2 facilities were designed to make it possible to easily scale up products that have been certified at the A-1 facilities. This will enable us to adequate respond with supplies of products for which sudden increases in demand are foreseen. Utilizing the features of these two facilities, we will now continue with trial production and construction our mass production system.
On the other hand, Toyo Gosei is also tackling integrated production from ArF monomers to ArF polymers. This will make it possible to freely synthesize various ArF monomers to order.
The device capacity and processing amount is as follows.
Attained vacuum: 1 Pa (0.008 Torr) max.
Maximum heated temperature: 160 ℃
Processing capacity: 50 liters/hour
We intend to provide our customers with ArF polymers that meet their needs "with high quality, at low cost".
